The peroxide route of the successive ionic deposition technique of nanolayer synthesis is considered. This technique allows one to obtain the desired thickness of the nanolayers of metal oxides, hydroxides, and peroxides with an accuracy of about a fraction of nanometer. Three groups of the chemical reactions based on the features of the H2O2 molecule are distinguished. These features are the redox capability of H2H2, its bifunctionality in the exchange between a proton and a metal ion, and the solubility of a metal peroxicomplexe [MeOO](n-). The synthesis of nanolayers of tin oxide hydrate SnO2 . nH(2)O, tallium (III) oxide hydrate Tl2O3 . nH(2)O and copper peroxide CuO1+x. nH(2)O is described. For the first time, the synthesis of nanolayers of binary peroxides of the type LayNbOz . nH(2)O is suggested. The thermal transformations of the compounds synthesized are discussed and the conclusion about the low-temperature production of the metal oxide nanolayers on the basis of the corresponding nanolayers of hydroxides and peroxides is made. The suggested route allows synthesis a wide range of superlattices of nanolayers of metal peroxides and peroxide hydrate that are impossible to be obtained with other methods.