화학공학소재연구정보센터
Thin Solid Films, Vol.313-314, 587-589, 1998
Verification of GaAs/AlAs superlattice theory by spectroscopic ellipsometry
Short-period GaAs/AlAs superlattice samples were prepared according to the theoretical calculations by Xia and Chang. We measured the ellipsometric spectra of these samples, and then obtained the complex dielectric function spectra of the superlattices. A comparison between the experimental and theoretical curves of the dielectric function spectra is performed. The Xia-Chang theory of short-period GaAs/AlAs superlattices has been verified by our experimental results.