Metal/insulator multilayers composed of Ti1-xAgx alloy (0 less than or equal to x less than or equal to 1) and MgO were prepared on MgO(001) substrates at 273 K by electron beam evaporation in ultrahigh vacuum. Reflection high-energy electron diffraction, X-ray diffraction and transmission electron microscopic measurements revealed that Ti0.97Ag0.03/MgO and Ti/MgO multilayers were epitaxially grown superlattices. It was found that the crystal structures of the metals (Ti0.97Ag0.03, Ti) in the superlattices were tetragonal.