화학공학소재연구정보센터
Thin Solid Films, Vol.321, No.1-2, 206-214, 1998
Electric field tailoring in MBE-grown vertical sub-100 nm MOSFETs
We introduce the concept of electric-field-tailoring in MBE-grown vertical metal-oxide semiconductor field-effect transistors (MOS-FETs) and show that significant improvements in terms of supply voltage, current and speed are achievable in such MOSFETs by employing a planar-doped-barrier MOSFET (PDBFET) concept. Investigation of electrical characteristics and carrier transport in sub-100 nm channel PDBFETs shows the predicted improvements compared with classical MOSFETs.