Waveguiding thin films of Ti:sapphire were successfully grown on quartz substrates by the technique of pulsed laser deposition from crystalline targets of various Ti2O3 concentrations. The XRD spectra, titanium concentration, index of refraction, waveguiding properties and losses, and luminescence spectrum of films were studied. The refractive index of the films increases by 0.002 with change of dopant concentration of 0.37 wt.% of Ti2O3. The waveguide losses of a value of similar to 6.5 dB/cm for 1 mu m film thickness were measured.