화학공학소재연구정보센터
Thin Solid Films, Vol.323, No.1-2, 183-187, 1998
Numerical simulation for determining the mechanical properties of thin metal films using depth-sensing indentation technique
The finite element method (FEM) for elastoplastic large strain was employed to study the indentation experiment of Al film on Si substrate by a rigid spherical indenter. Two relationships between the mechanical properties of the film and the specific values of the load-displacement curve have been obtained. Using a hybrid method that involves the combination of these two relationships with nanoindentation test, the hardening index and yield strength of the metal film can be determined.