화학공학소재연구정보센터
Thin Solid Films, Vol.326, No.1-2, 60-62, 1998
Transparent conducting ZnO : Al films deposited on organic substrates deposited by r.f. magnetron-sputtering
Transparent conducting ZnO:Al films with good adhesion and low resistivity have been prepared on organic substrales by r.f. magnetron-sputtering. Polycrystalline ZnO:Al films having a preferred orientation were obtained with resistivity 1.84 x 10(-3) Omega cm, carrier concentration 4.62. x 10(20) cm(-3) and Hall mobility 7.34 cm(2)/v per s. The average transmittance of the films is 84% in the wavelength range of the visible spectrum.