Thin Solid Films, Vol.318, No.1-2, 231-233, 1998
Formation of Al-nanoclusters on Si(111)-surfaces
Reflection high-energy electron diffraction (RHEED), spot profile analysis low-energy electron diffraction (SPA-LEED), and scanning force microscopy (SFM) have been used to study the formation of Aluminum nanoclusters on the Si(111) surface, out of a thin film of one to three monolayers (ML) thickness, deposited by molecular beam epitaxy.
Keywords:reflection high-energy electron diffraction;spot profile analysis low-energy electron diffraction;scanning force microscopy;molecular beam epitaxy