Thin films of NdBa2Cu3Oy superconductor were prepared on MgO(100) substrates by mist ICP evaporation using organometallic sol in which alkoxides of each metal element were dissolved in organic solvents as a source material. This method is one of high-temperature plasma deposition techniques introducing source material into ICP (inductively coupled plasma). It was important to control substrate-plasma distance and oxygen partial pressure in the chamber to obtain (00l) peaks of NdBa2Cu3Oy superconductor, and this as-deposited film was also highly in-plane-oriented along the a-axis and b-axis. Furthermore, the surface morphology of this film was composed of rectangular shapes of grains. The superconducting transition temperature T-c for the post-annealed film was 91-92 K.