The (100) textured diamond films have been successfully deposited on aluminum nitride (AlN) ceramics by hot filament chemical vapor deposition. The properties of the films grown for different times and various substrate temperatures were characterized by X-ray diffraction and scanning electron microscopy. It can be clearly found that the growth rate of films on [100]-direction is higher than that of [111]-direction, and the textured degree increases with increasing deposition time. The highest textured degree can reach as high as 94.5% for a him grown for 75 h.