화학공학소재연구정보센터
Thin Solid Films, Vol.335, No.1-2, 27-31, 1998
Growth and characterization of diamond-like carbon films by pulsed laser deposition and hydrogen beam treatment
Amorphous diamond-like carbon films have been grown by pulsed laser deposition using a graphite target both with and without an atomic hydrogen beam incident on the growing film. Films grown with the hydrogen beam showed resistivity nearly two orders of magnitude higher than the films grown without hydrogen. Raman scattering confirmed a higher degree of sp(3) bonding in films exposed to hydrogen atoms during growth. Films grown without hydrogen but exposed to the hydrogen beam after growth showed a significant increase in resistivity after exposure.