화학공학소재연구정보센터
Thin Solid Films, Vol.337, No.1-2, 129-132, 1999
Large-grained polycrystalline silicon on glass by copper vapor laser annealing
We crystallized 400 nm thick amorphous silicon films on low cost glass substrates using a pulsed copper vapor laser. The moderate pulse energy (60 mu J) and high repetition rate (20 kHz) of the laser allow crystallization scanning rates up to 10 mm/s. The resulting polycrystalline silicon films show large elongated grains 3 mu m wide and several tens of microns in length.