화학공학소재연구정보센터
Thin Solid Films, Vol.342, No.1-2, 180-183, 1999
Electroepitaxy: the control of the kinetics and morphology of InSb
The surface micromorphology and growth rate of InSb layers grown by liquid phase electroepitaxy (LPEE) on B(111) surface of InSb substrate were studied. The mixing of In- and Bi-solutions was used to realize the kinetic regime of crystallization. The influence of solution mixing, growth temperatures and supersaturation are manifested in different micromorphology and growth mechanisms such as dislocation-controlled facet, or the layer and terrace-layer one. The conditions to improve the flatness of the layers are determined.