Metal/insulator multilayers composed of Ti1-xAgx (0.26 < x < 0.54) alloy and MgO were prepared on MgO(001) substrates at 273 K by electron beam evaporation in ultrahigh vacuum. Ti-Ag alloy layers in the superlattices were deposited using two E-guns of Ti and AE simultaneously, at the various deposition rates. X-ray diffraction and transmission electron microscopic measurements revealed that TiAg/MgO multilayers were epitaxially grown superlattice and that Ti-Ag in the superlattices were tetragonal or cubic structures. After I h heating at 573 K the X-ray diffraction pattern in low angle region showed superlattice structures, but the modulating wavelengths of the superlattice were found to be smaller than those of as-grown superlattices.