화학공학소재연구정보센터
Thin Solid Films, Vol.345, No.2, 307-311, 1999
Effect of heat treatment on nickel manganite thin film thermistors deposited by electron beam evaporation
Thin films of nickel manganite were deposited onto different substrates by means of electron beam evaporation from a powder source of the compound and annealed at 500 and 600 degrees C for 30 min. in air, oxygen or nitrogen to study the effects of annealing temperature and atmosphere on the structure and properties of grown thin films. X-ray diffraction and infrared spectroscopy were used to confirm the formation of nickel manganite; the integrity of the films and their elemental compositions were assessed using a scanning electron microscope equipped with an energy dispersive X-ray analyser. Resistance-temperature characteristics were measured between room temperature and 600 K. The values of thermistor constant (B) were found to be dependent on the post growth treatments; annealing in O-2 or air yielded the lowest values of B similar to 2000-3000 K, while as-deposited and N-2 annealed layers had values of B similar to 5000-6500 K.