Thin Solid Films, Vol.347, No.1-2, 56-59, 1999
X-ray photoelectron spectroscopy of highly conducting and amorphous osmium dioxide thin films
We report characterization of highly conducting and amorphous osmium dioxide thin films. The films deposited by glow discharge of osmium tetroxide showed no peaks in X-ray diffraction and homogeneous distribution of osmium and oxygen atoms in depth profile by Auger electron spectroscopy. The amorphous Os-O films were highly conducting (<5 X 10(-3) Ohm cm), and the conductivity was almost temperature independent. High-resolution X-ray photoelectron spectroscopy revealed that the films were osmium dioxide (OsO2). Argon ion bombardment of the film reduced the Os4+ to metal OsO via a transition state (Os1.6+).