Thin Solid Films, Vol.348, No.1-2, 273-278, 1999
Colloidal sol-gel ITO films on tube grown silicon
Electrical and optical properties of colloidal PTO sol-gel films on glass substrates have been investigated. The optical gap of 3.14 eV and room temperature conductivity of 4 Ohm(-1) cm(-1) were obtained on ITO layers of about 500 Angstrom thickness. Heterostructures of ITO/n-Si have been obtained by colloidal sol-gel deposition of ITO. In this deposition method, the oxidation of silicon during the heterostructure formation can be avoided. The silicon substrates were cut out of silicon tubes. Electrical and photoelectric properties of these structures have been studied in comparison with those of p-n tube-Si junctions obtained by thermal boron diffusion. On ITO/n-Si heterojunctions, the spectral quantum efficiency has a maximum value of about two times higher and a blue shift of the maximum position from 0.75 to 0.6 mu m, than those for p-n junctions. A theoretical investigation of the I-V curves for ITO/n-Si heterojunctions under various illumination levels has been performed and contribution of the tunneling and series resistance phenomena were evaluated.