Thin Solid Films, Vol.349, No.1-2, 56-60, 1999
Textures of CeO2 films grown on biaxially textured Pt0.7Pd0.3 substrates
We investigated the textures of CeO2 films grown on biaxially textured Pt0.7Pd0.3 tapes, These might be of interest for developing new substrates of high Tc superconducting coated conductors for small scale applications. Using the rf sputtering method we deposited CeO2 films and characterized their textures by X-ray diffraction and scanning electron microscopy. We found that the growth of the CeO2 film was highly influenced by the operating gas as well as the inclination of the substrate during deposition. In the mixed gas of Ar + O-2, the CeO2 films grew with polycrystalline textures composed of (111)- and (002)-oriented domains. The CeO2 films deposited in an atmosphere of Ar, with inclination angles of less than 45 degrees, showed similar polycrystallinity. However, the growth of the CeO2 films was always well textured in Ar gas with an inclination angle larger than 50 degrees.