화학공학소재연구정보센터
Thin Solid Films, Vol.355-356, 184-188, 1999
Nitrogenation of diamond by glow discharge plasma treatment
The effect of nitrogen incorporation on the electrical properties of diamond is currently under intense study. In this work, diamond grown by hot filament chemical vapor deposition was exposed to a radiofrequency (40 MHz glow discharge of pure nitrogen for times of between 5 min and 1 h. The effect of this exposure on the chemical and elemental composition of the samples was assessed by Raman and X-ray photoelectron spectroscopy. Changes in the electrical resistance with increasing film nitrogenation and temperature were measured. The scope and limitations of this approach to nitrogenation are evaluated.