화학공학소재연구정보센터
Thin Solid Films, Vol.357, No.2, 159-165, 1999
The wear effect on microstructure of DLC films PECVD-deposited on Al2O3 : TiC substrates - a confocal micro-Raman study
DLC films are required to possess a high resistance to wear and provide a low coefficient of friction to protect both the head and the recording medium layer on a hard disc from the damage caused by routine read-write operation. In this study, the wear characteristic of DLC films deposited on Al2O3:TiC (70 wt.% Al2O3 + 30 wt.% TiC) substrate by plasma-enhanced chemical vapour deposition (PECVD), was studied using a pin-on-disc system. When tested against a stainless steel bearing ball (AISI-52100), the friction coefficient of Al2O3:TiC substrate was found to be reduced by approximately 74% using DLC coating with a very low wear rate under the test conditions selected. To characterize the microstructure of DLC coatings before and after wear test, confocal micro-Raman spectroscopy was used, and operated in both the point-mode and the line-mode. A change in Raman parameters of the DLC films with the wear track depth was revealed, and clearly depicted, by operating the Raman system in the line-mode. Moreover, Raman mapping of band position, band width and the band intensity of G-band and D-band can provide additional information about the changes in the film microstructure; especially over a large area. Graphitization was observed in the wear track region, which results mainly from the release of hydrogen in the DLC, caused by wear during testing.