화학공학소재연구정보센터
Thin Solid Films, Vol.360, No.1-2, 233-240, 2000
Characterization of indium zinc oxide thin films prepared by pulsed laser deposition using a Zn3In2O6 target
Using a Zn3In2O6 target, indium-zinc oxide films were prepared by pulsed laser deposition. The influence of the substrate deposition temperature and the oxygen pressure on the structure, optical and electrical properties were studied. Crystalline films are obtained for substrate temperatures above 200 degrees C. At the optimum substrate deposition temperature of 500 degrees C and the optimum oxygen pressure of 10(-3) mbar, both conditions that indeed lead to the highest conductivity, Zn3In2O6 films exhibit a transparency of 85% in the visible region and a conductivity of 1000 S/cm. Depositions carried out in oxygen and reducing gas, 93% Ar/7% H-2, result in large discrepancies between the target stoichiometry and the film composition. The Zn/In (at.%) ratio of 1.5 is only preserved for oxygen pressures of 10(-2)-10(-3) mbar and a 93% Ar/7% H-2 pressure of 10(-2) mbar. The optical properties are basically nor affected by the type of atmosphere used during the film deposition, unlike the conductivity which significantly increases from 80 to 1400 S/cm for a film deposited in 10(-2) mbar of O-2 and in 93% Ar/ 7% H-2, respectively.