Due to its basic physical and chemical properties CdTe has become a favoured base material for thin film solar cells, using robust, high throughput manufacturing procedures. The technology shows significant potential for attaining cost levels of < 0.5 Euro/W-p. Close-spaced sublimation (CSS) is the fastest and simplest deposition process for both semiconductors used, CdTe and CdS, permitting in-line production at a high linear speed of about 1 m/min. The individual manufacturing steps for integrated modules are explained in view of their incorporation into the production line. ANTEC solar GmbH is engaged to enter the production of CdTe thin film modules on a scale of 10 MWp (100 000 m(2)) per annum, using CSS as the deposition procedure for the semiconductor films, and high-rare in-line sputtering for transparent and opaque contacts. Standard module size will be 60 x 120 cm(2). The production line is presently under construction.