Thin Solid Films, Vol.368, No.2, 227-230, 2000
Preparation of SrRuO3 thin film by chemical reactive pulsed laser deposition
The emission characteristics and transport behavior of atoms and ions in laser ablation plume in vacuum and in varied O-2 pressure were investigated. A collision-dominated expansion was found in O-2 ambient, which enhanced excited atoms and ions, and different atoms and ions tend to get the almost same velocities due to collision. These were thought to give an advantage for in situ reaction during the process of thin film deposition.
Keywords:ABLATION