화학공학소재연구정보센터
Thin Solid Films, Vol.368, No.2, 297-299, 2000
CVD diamond thin film for IR optics and X-ray optics
Optical quality diamond thin films have been deposited using a hot filament chemical vapor deposition (HFCVD) system. The diamond films were characterized by Raman shift spectra, X-ray diffraction spectra, scanning electron microscopy. Diamond near infrared antireflective filter window and diamond X-ray window have been fabricated using above technology. The diamond near infrared antireflective filter windows have been successfully used in on-line monitoring at Shanghai Baosteel Works. It has produced annual benefit as much as 2.4 million RMB Yuan.