화학공학소재연구정보센터
Materials Science Forum, Vol.338-3, 13-16, 2000
Progress in SiC bulk growth
4H and 6H-SiC ingots with diameter up to 30 mm have been grown by the Modified Lely Method with in situ etching. The original source design allowed us to maintain an excess of Si above the growing crystal to decrease defect density.