화학공학소재연구정보센터
Materials Science Forum, Vol.338-3, 75-78, 2000
SiC single crystal growth rate measurement by in-situ observation using the transmission X-ray technique
The growth rate of SiC bulk single crystal by sublimation was measured in real time by using the transmission X-ray technique. The growth rate obtained by transmission X-ray intensity corresponds to the growth rate measured by nitrogen marker. The growth rate increases as the growth temperature increases and as pressure decreases. While taking into account the pressure balance between the surrounding pressure and vapor pressures of seed and source, the growth rate can be calculated by mass flux from source to seed.