Materials Science Forum, Vol.338-3, 1191-1194, 2000
Large contact Ti/4H-SiC Schottky diodes fabricated using standard silicon processing techniques
This paper presents electrical characteristics of Ti/4H-SiC Schottky diodes utilizing the same fabrication abilities (procedures, equipment, personnel) used in a silicon fabrication process line. The characterization study includes forward and reverse I-V temperature characteristics together with C-V frequency characteristics. The effect of the temperature and the impact of a post metalization anneal was also investigated. Pre-fabricated surface morphology characterization was also undertaken.