Materials Science Forum, Vol.338-3, 1447-1450, 2000
Epitaxial 6H-SiC layers as defectors of nuclear particles
Schottky diodes based on n-n(+) 6H-SiC epitaxial layers grown by sublimation epitaxy were used for registration of alpha particles Cm-244. Specific features of nonequilibrium charge transfer were studied in regimes of total and partial structure depletion. A relationship was revealed between film characteristics and the dependence of the signal amplitude and the shape of the amplitude spectrum on diode bias.
Keywords:alpha particles spectroscopy;amplitude spectrum;diffusion length;energy of electron-hole pair formation;nonuniformity of lifetime;sublimation epitaxy