We have developed a-Si-based solar cells with plastic film substrate and achieved a stabilized efficiency of 9% in a 40 cm x 80 cm cell. The structure and fabrication process of flexible solar cells are presented. Then we discuss the merits and demerits of our process from the viewpoint of mass production, and clarify that the SCAF cell has a good adaptability to mass production. (C) 2001 Elsevier Science B.V. All rights reserved.