Role of hydrogen in hydrogenated microcrystalline silicon

Itoh T; Yamamoto K; Harada H; Yamana N; Yoshida N; Inouchi H; Nonomura S; Nitta S

Solar Energy Materials and Solar Cells, Vol.66, No.1-4, 239-244, 2001

DOI10.1016/S0927-0248(00)00179-3 Export Citation

Role of hydrogen in hydrogenated microcrystalline silicon

Itoh T, Yamamoto K, Harada H, Yamana N, Yoshida N, Inouchi H, Nonomura S, Nitta S

The integrated intensity of the IR absorption mode near 640 cm(-1) is directly proportional to hydrogen density while that around 2000-2100 cm(-1) is not proportional to this. The crystallinity of a sample prepared by hot-wire assisted PECVD (HWAPECVD) is higher than that by PECVD. The hydrogen density of a sample prepared by HWAPECVD is smaller than that by PECVD. The mode near 840cm(-1) in IR absorption spectrum for a sample prepared by HWAPECVD is smaller than that by PECVD. The properties and the role of hydrogen in muc-Si:H are discussed. (C) 2001 Elsevier Science B.V. All rights reserved.

Keywords:mu c-Si : H;hydrogen radical;(Si-H-2)(n) chain structure;hot-wire assisted PECVD;hydrogen density