ZnO films prepared by magnetron sputtering on glass substrates and textured by postdeposition chemical etching are applied as substrates for p-i-n solar cells. Using both rf and de sputtering, similar surface textures can be achieved upon etching. Excellent light trapping is demonstrated by high quantum efficiencies at long wavelengths for microcrystalline silicon solar cells. Applying an optimized microcrystalline/amorphous p-layer design, stacked solar cells with amorphous silicon top cells yield similarly high stabilized efficiencies on ZnO as on state-of-the-art SnO2 (9.7% for a-Si/a-Si). The efficiencies are significantly higher than on SnO2-coated float glass as used for module production. (C) 2001 Elsevier Science B.V. All rights reserved.