A new vapor deposition process, polarized electrochemical vapor deposition (PEVD), has been developed recently. The significance of PEVD is that it applies solid state ionic techniques to modify the widely accepted CVD technique under well-controlled conditions in a solid electrochemical cell. This provides PEVD with easy process control and unique electrocrystallization behavior. Consequently, it holds promise for a wide range of potential applications for solid stare ionic devices. Investigations show that PEVD is the most suitable technique to improve solid electrolyte/electrode contact and, subsequently, the performance of solid state ionic devices. In this paper, current applications of PEVD for potentiometric gaseous oxide sensors and solid oxide fuel cells is discussed.