Lithium intercalation materials are of special interest for cathodes in rechargeable batteries. We used a novel chemical solution-based route for the synthesis of Li(Mn, Co, Ni) oxides, and their thin films were deposited by spin coating. Films of LiMnxNi1-xO2, LiMn2-xCoxO4, and LiNi1-xCoxO2 were deposited by spin coating from the solution at a comparatively lower substrate temperature similar to 600 degreesC. The resulting films were characterized using X-ray diffraction, impedance spectroscopy, and Raman spectroscopy. Because of the different electrode potentials associated with this material system, thin films of these materials deposited by spin coating could be suitable as a cathode for Li-ion/polymer thin film batteries.