화학공학소재연구정보센터
Thin Solid Films, Vol.380, No.1-2, 173-175, 2000
Ge-Si intermixing in Ge quantum dots on Si
We have provided direct evidence for the presence of considerable Si-Ge intermixing in strained and unstrained Ge quantum dots deposited on Si(001) and Si(111). The local structure around Ce was probed by using Ge K-edge X-ray absorption spectroscopy; complementary evidence for intermixing was provided by AFM and STM studies. These results implied that the strain energy in the dots was reduced by Si atoms diffusing into the dots, resulting in a modified form of Stranski-Krastanov growth.