화학공학소재연구정보센터
Polymer, Vol.41, No.16, 6295-6299, 2000
Topographical modifications in PADC polymer under electron beam irradiation
A study of the topographical modifications of a PADC polymer substrate under 25 keV-Electron Beam (EB) irradiation is presented. The thickness variations as a function of the electronic fluence are systematically measured and show a fall in thickness. The causes of this phenomenon are discussed. Simulations of the interaction of the 25 keV-EB and the polymer are also carried out with the aim to correlate the deposited energy and the thickness variations.