Plasma polymerization of hexamethyldisiloxane(HMDSO) in the presence of different carrier gases such as H-2, He, N-2, Ar, and O-2 was carried out using an inductively coupled electrodeless glow discharge. The polymerization kinetics showed that the monomer HMDSO plasma-polymerized at different rates from low to high for the carrier gases H-2, He, N-2, Ar, and O-2 in that order. The products were studied using FTIR, electron spectroscopy for chemical analysis, and elemental analysis. The results indicated that HMDSO molecules underwent different degrees of fragmentation in plasma polymerization for different carrier gases and radio frequency (RF) powers. The polymer deposition rate and the structures of products were mainly dependent on molecular fragmentation, which varied with carrier gas and imposed RF power. O-2 and H-2 gases can incorporate in the plasma polymers to form products containing more oxygen or hydrogen components, while other gases such as N-2 have no detectable component in products.