화학공학소재연구정보센터
Combustion Science and Technology, Vol.133, No.1-3, 151-160, 1998
Simulation and experiment of low-pressure oxygen - Nitrogen mixture gas glow discharge plasma
Oxygen-nitrogen mixture gas plasma has been studied theoretically and experimentally to understand the basic property of the plasma. Large volume spatially uniform plasma was assumed for simplicity. 17 kinds of species and their various reactions were considered. The effect of nitrogen gas mixing appeared in the oxygen atom density in the plasma. The experimental confirmation has also been done and discussed.