Model catalysts were prepared by spin-coating untreated and hydrated silicon wafers using Cu(NO3)(2)(H2O)(2.5) solved in cyclohexanone as precursor. The prepared surfaces were examined by atomic force microscopy and Rutherford backscattering spectrometry. Spin-coating untreated silicon wafers resulted in clusters composed of small particles. The use of hydrated silicon wafers as substrate resulted in highly disperse small particles. We attribute the difference in surface morphology to the presence of more silanol groups on the surface of the hydrated wafers.