화학공학소재연구정보센터
Thin Solid Films, Vol.319, No.1-2, 153-156, 1998
The volume expansion of the {11(2)over-bar-0} planar defect in 2H-GaN/6H-SiC(0001)(Si) grown by MBE
In an attempt to complete the determination of the atomic structure of the {11 (2) over bar 0} planar defects which are found systematically in the interfacial area of (2H) GaN-AlN/6H-SiC, high resolution electron microscopy and atomistic calculations were used and an adequate model was chosen. It is found that the atomic structure corresponds to the ideal 1/2[1 (1) over bar 01]{11 (2) over bar 0} stacking fault model, with no volume expansion.