화학공학소재연구정보센터
Thin Solid Films, Vol.350, No.1-2, 49-52, 1999
Production of porous carbon thin films by pulsed laser deposition
Pulsed laser deposition (PLD) has been used together with the Glancing Angle Deposition (GLAD) technique [1,2] for the first time to produce highly porous structured films. A laser produced carbon plasma and Vapour plume was deposited at a highly oblique incident angle onto rotating Si substrates. resulting in films exhibiting high bull; porosity and controlled columnar microstructure. By varying the substrate rotation rate, the shape of the microcolumns can be tailored. These results extend the versatility of the GLAD process to materials not readily deposited by means of traditional physical vapour deposition techniques.