Transparent conductive FTO, ATO and ITO films were synthesized by spray pyrolysis technique on flat 12 x 12 cm borosilicate glass substrates at 500-550 degrees C and investigated with respect to their electrical and optical properties. The resistivity of sprayed ITO films decreases with the thickness down to 3.0 x 10(-4) Omega cm (300 nm). The optical transmission in the visible range is 80% and the near IR reflection up to 96% for thicknesses larger than 300 nm. A reducing treatment at 400 degrees C in forming gas still decreases the resistivity by a factor of two. Bending of the coated glasses in air at 650 degrees C for 1.5 h increases the resistivity of the coatings on the tensile side of the substrate by a factor of 3-4 and by a factor 2 on the compressed side. A subsequent reducing treatment in forming gas at 400 degrees C leads to a drastic decrease of resistivity in both cases by a factor of 5-7 with resulting value rho = 2-3 x 10(-4) Omega cm. ATO layers have lower visible transmission (70-75%) due to stronger absorption and a higher resistivity (rho = 1 X 10(-3) 12 cm). Spray pyrolyzed FTO coatings have a resistivity rho = 5 x 10(-3) Omega cm for film thicknesses >350 nm.