화학공학소재연구정보센터
Thin Solid Films, Vol.351, No.1-2, 190-193, 1999
Hall current accelerator for pre-treatment of large area glass sheets
A large aperture Hall current accelerator has been developed for cleaning glass sheets before vacuum are deposition of decorative layers. Hall current source advantages towards Kaufman's one in industrial processes are emphasized. Source 'sputter profiles' are given for silica glass and poly(methyl metacrylate). Sputter cleaning of aluminum has been characterized in terms of roughness and microhardness variation.