Thin Solid Films, Vol.370, No.1-2, 5-9, 2000
Synthetic process of the sol-gel derived Pb(Zr0.53Ti0.47)O-3 films using poly vinyl butyral binder
Synthetic process of sol-gel grown lead-zirconate-titanate (PZT) films using poly vinyl butyral (PVB) binder has been studied. By the present method, thick PZT films with about 7 mu m in thickness were successfully grown, whereas thick films were not achieved without the use of the binder. In the synthetic process, amorphous PZT particles with 0.6-1.0 mu m in diameter were formed at a relatively low temperature of 50 degrees C and Pb projections were observed at 300 degrees C. Furthermore, PbO was observed at the surface of amorphous PZT particles at 400 degrees C. At 500 degrees C, PZT perovskite phase started to be observed together with residual PbO phase. Finally, single PZT perovskite phase, which shows the dielectric constant and dissipation factor of 145.5 and 0.032, respectively, at a frequency of 1 kHz, was obtained at 800 degrees C. We suggest that the use of PVB binder plays an important role in the fabrication of thick PZT film.