Carbon thin films containing many fine carbon particles were deposited by a pulsed ArF laser ablation technique assisted by inductively coupled plasma (ICP). The sizes of the particles were found to be similar to 100 nm. The particles seemed to be coagulated from several finer particles of size similar to 10 nm. When ICP was applied to a plume, the shape of the coagulated particles became spherical. The deposited surface was assumed to be diamond-like carbon based on the binding energy of carbon (1s) in the particle obtained by XPS spectra.