화학공학소재연구정보센터
Thin Solid Films, Vol.386, No.2, 248-251, 2001
Electron temperature and ion energy control in modified magnetron-typed RF discharge
The basic properties of the control of electron temperature and ion energy in modified magnetron-typed (MMT) radio-frequency (RF) plasma are investigated by using the grid and double-plasma methods, respectively. By changing the open area of the slots situated on a cylindrical grid, the electron temperature in the center region is controlled continuously in the range from 0.5 to 2.4 eV. On the other hand. by changing the plasma potential of an ion-beam source, we control the ion energy from 0 to 30 eV.