화학공학소재연구정보센터
Thin Solid Films, Vol.389, No.1-2, 315-320, 2001
Effect of nitrogen addition on the elastic and structural properties of amorphous carbon thin films
Nitrogen-doped amorphous hydrogenated hard carbon films were deposited by r.f. glow discharge from methane-nitrogen mixtures onto silicon substrates. The elastic properties of films obtained for different N-2 partial pressures were investigated by Brillouin light scattering, while Raman spectroscopy, X-ray photoelectron spectroscopy and X-ray reflectivity were exploited to study their structural and vibrational properties. Addition of a low percentage of nitrogen in the films induces marked modifications of the microscopic film structure, which induces a clear decrease of the elastic constants.