Radio frequency (rf) inductively coupled thermal plasma (ICTP) was used to fabricate fullerenes (C-60,C-70, etc.) by direct evaporation of carbon powder injected into the plasma. Spectroscopic observation of the plasma was made for molecular band spectra of C-2 and atomic lines of C. The formation of fullerenes C-60 and C-70 as well as higher fullerenes were checked and recognized by high performance liquid chromatography (HPLC) and time-of-flight mass spectrometer (TFMS). The suitable conditions for the synthesis of fullerenes within the experimental conditions adopted were 10-kPa plasma pressure, with a considerably higher flow rate of approximately 150 l/min for mixed-gas condition of Ar, He and CO2, with carbon powder of average diameter 20 mum The results showed that the productivity of fullerenes has a relation to the intensity of C-2 molecular and C atomic spectra from the induction plasma. Mixing of Si with C particles has a kind of role in enhancing the synthesis rate of fullerenes C-60, as well as the higher order fullerenes.