Thin Solid Films, Vol.390, No.1-2, 76-82, 2001
Large-area uniform dust-free plasma CVD
In the weak magnetic field perpendicular to the discharge electric field, both the electrons and positive ions are transported in the direction of EXB drift by the space charge electric field produced by the preceded electrons. As a result, radicals are generated uniformly outside of discharge space between the electrodes in the direction of EXB drift. On the other hand, negatively charged heavy particles such as dust particles can be removed from discharge space in the direction opposite to E X B drift of plasmas. The authors have studied the transport mechanisms of magnetized dusty plasmas and its applications for the large-area uniform a-Si:H thin film deposition in plasma CVD methods. This paper reviews the transport phenomena and the transport mechanisms of dust particles and the results of film preparation under particle-free process conditions.