Thin Solid Films, Vol.391, No.2, 265-269, 2001
Deposition on micromachined silicon substrates of gas sensitive layers obtained by a wet chemical route: a CO/CH4 high performance sensor
This work reports the problems related to deposition of porous nanomaterials onto micromechanized silicon structures by a wet chemical route. Gas test results of the sensors made in this manner are presented and discussed. They show the viability of using wet chemical routes for developing a new generation of gas sensors that combine easily, and have modified sensing layers with the advantages of the micromechanized substrates. As an example, a satisfactory implementation of SnO2 sensors for CO/CH4 monitoring by means of microdropping is presented.