Thin Solid Films, Vol.392, No.2, 334-337, 2001
Low resisitivity transparent electrodes for displays on polymer substrates
One of the main difficulties for manufacturing displays on polymer substrates is the deposition of low resistivity indium tin oxide (ITO). Most polymer materials do not withstand substrate temperatures above 200 degreesC, which are required for conventional high quality ITO process on glass substrates. This is the reason why a solution is proposed which includes the substitution of a single ITO layer by a three layer system consisting of ITO/Ag/ITO. A sheet resistance below 16 Omega/rectangle at a transmittance over 80% at a 550-nm wavelength could be achieved. Additionally, the overall indium content in the coating is reduced. This will lead to a reduction of target costs during production.